Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 276 - 288
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 839 - 847
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 276 - 288
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 839 - 847