Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2016 > 25 > 2 > 262 - 274
Journal of Microelectromechanical Systems > 2016 > 25 > 2 > 401 - 412
Journal of Microelectromechanical Systems > 2016 > 25 > 2 > 262 - 274
Journal of Microelectromechanical Systems > 2016 > 25 > 2 > 401 - 412