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To achieve larger scale and higher speed single flux quantum (SFQ) circuits, we have been developing a 10-kA/cm2 Nb multi-layer fabrication process composed of more than six pla- narized Nb layers, an Nb/AlOx /Nb junction layer, a Mo resistor layer, and SiO2 insulator layers. To evaluate reliability of the fabrication process, we have designed superconducting random access memories (RAMs) with four...
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