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The characteristics of a waveguide photodiode with a thin absorption layer are reported. A responsivity of 1.08 A/W at 1.55 μm was measured using a 0.1-μm -thick absorption region with a polarization dependence of less than 0.25 dB. A thin absorption layer enables us to use a thicker intrinsic layer. Using a thicker intrinsic region of 0.9 μm and an adiabatically reduced waveguide width, a bandwidth...
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