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We present a new approach for the fabrication of electrooptically tunable microring resonators in lithium niobate. Planar optical waveguides for vertical light confinement (Deltano = 0.17) are produced by fluorine ion implantation. Optical microrings and bus waveguides are then formed by laser lithography masking and Ar+ plasma etching. Electrodes are optically isolated from the optical microrings...
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