IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 530 - 538
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 456 - 461
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 551 - 557
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 515 - 522
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 501 - 514
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 475 - 488
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 462 - 474
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 489 - 500
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 539 - 550
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > C1 - C4
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 558 - 572
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 574
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > 584
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 4 > C2