IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 468 - 479
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 480 - 493
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 447 - 459
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 511 - 515
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 373 - 383
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 408 - 419
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 460 - 467
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 384 - 393
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 420 - 431
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 531 - 540
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 3 > 494 - 501