IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 2 > 176 - 186
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 4 > 578 - 584
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 2 > 176 - 186
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 4 > 578 - 584