IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 1 > 117 - 125
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 2 > 171 - 179
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 3 > 367 - 373
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 4 > 528 - 544