IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 3 > 374 - 384
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 3 > 385 - 392
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 3 > 374 - 384
IEEE Transactions on Semiconductor Manufacturing > 2015 > 28 > 3 > 385 - 392