IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 480 - 485
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 450 - 455
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 486 - 493
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 475 - 479
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 526 - 530