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H2/Ar electron cyclotron resonance plasma processing of the high-resistivity (111) CdTe crystals was studied to find its effect on the leakage current and the gamma ray detection properties of the detectors. All the crystals were chemically etched in a bromine–methanol (BM) solution prior to the plasma processing to obtain a smooth surface. A remarkable reduction in both the surface and the bulk leakage...
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