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This letter reports the proof-of-concept results for the new nontraditional nanophase-switching electrostatic-discharge (ESD) protection mechanism and nanocrossbar ESD structures. Experiment shows good ESD switching and protection, i.e., a fast response of 100 ps, a ultralow leakage of 0.26 pA, and an ESD protection of >; 267 V/μm2. A new dispersed local ESD tunneling model is proposed,...
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