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This paper presents the analysis of the source of Zero-Rate Out(ZRO) of MEMS vibratory gyroscopes. The temperature effects on the performance of MEMS gyroscopes is studied. Related experiments demonstrate that ZRO of MEMS vibratory changes significantly with temperature. On the basis of the ZRO analysis, a novel temperature compensation method is proposed, in which a compensation model is established...
This work presents the parasitic feed-through capacitance in a MEMS capacitive gyroscope with push-pull configuration. The push-pull configuration was adopted for driving the gyroscope resonator differentially to nullify the linear acceleration effect. The drive mode oscillator of the gyroscope was analyzed theoretically and experiments were carried out to quantize the parasitic feed-through level...
This paper presents a robust triangular-electrode based (TEB) capacitive detection method for MEMS gyroscopes. The TEB method utilizes the inherent nonlinearity of TEB variable-area sense capacitor to measure the amplitude and the phase of mechanical motion, and the derived amplitude and phase are independent of such system parameters as the carrier voltage, the nominal sense capacitance, the gain...
This work presents the analysis with experimental verification of ring-diode based readout circuit for MEMS vibratory gyroscopes. Detailed deductions on the C-V conversion and signal demodulation process were given with performance prediction using MATLAB simulation. Experimental verification of the analysis results was also carried out using a MEMS vibratory gyroscope. This work provided theoretical...
This paper reports a comparative study between double side-band (DSB) and single side-band (SSB) demodulation methods when applied to a general control system of MEMS gyroscopes. Theoretical analysis originally reveals the influence of phase delay variations of C/V sensing circuit in the drive loop on gyroscope output. A simulation is set up to evaluate the two demodulation algorithms, demonstrating...
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