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There are established macroscale fabrication methods to create parts of virtually any shape or size; but for components in the microscale range (thousands to tens of microns) there is a dearth of options for making 3D parts at high enough throughput to make them practical. This paper demonstrated a novel method to create novel micromolding processes that are capable of creating defect-free microscale...
In this paper, we present the theoretical analysis and calculation results for characterization of a graphene diaphragm applied for capacitive ultra-low pressure sensor structure, where a few layers of graphene diaphragm with radius of 8 µm and total thickness of 2 nm, the graphene diaphragm is suspended over a circular cavity. In this paper, the graphene film was fabricated by an atmospheric-pressure...
A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive...
This work presents a new vortex-based flow device. A corrugated dragonfly wing blocks in a microchannel of 250 µm wide good to capture particles and to reduce the chip size. Two conclusions have been found. The new flow chips made of PDMS and their microbes filling experiments firstly revealed that only one dragonfly wing in the channel works in particle capture but without choking. Secondly, COMSOL-Multiphysics...
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