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This paper presents the development results of multi-axis motion controller for precision electric drive. There are presented hardware and software architectures of motion controller based on the single digital signal processor. The special attention is paid to the analysis of digital computing precision, estimation and improvement of sensor resolution. The designed controller allows effective servo...
The paper presents the results of the research and development of the air bearing planar stage with the parallel kinematic. The stage includes four integrated linear motors, the stationary granite base and the moving slider supported by the air bearings. The servo-mode is organized using two-dimensional optical encoder and the control structure. The article discloses the main design features and common...
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