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The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it...
In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10−13 N/Hz0.5 at 229.3 kHz with 23500...
This paper introduces a piezoresistive cantilever that is designed for measuring the mass of airborne particles. The principle of mass measurement is based on measuring the frequency shift in the mechanical resonant frequency due to an additional mass deposited on the cantilever. To detect the resonant frequency, piezoresistors are fabricated on the surface of the cantilever and utilized as a strain...
This paper focuses on the study of an ultrathin Diamond-Like-Carbon layer acting as the mobile part of 2D microresonators. To overcome the low electrical conductivity of amorphous carbon, DLC is used in combination with few nanometer-thick metal layers to manufacture 15 to 20 nm thick membranes suspended over 0.8 to 2.3 µm wide trenches. After a description of the experimental means performed on these...
In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators...
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