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We will report our latest achievements with ultrathin NbN films for the development of conventional antenna coupled hot-electron-bolometer (AC-HEB) and of active metadevices, i.e. a frequency selective metamaterial with an integrated bolometer.
A focal plane array of 24×24 elements for imaging applications in the 0.6–1.2 THz range was fabricated in a SOI-CMOS process and post-processed with MEMS technology. The pixels are fully released antenna-coupled CMOS microbolometers, where the sensing element is a lateral diode. The chip includes a column-multiplexed readout circuit with digital calibration and analog output. The pixel responsivity...
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