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A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire substrates. The effect of film thickness and etching depth on the electromechanical coupling and velocity dispersion were calculated by finite element...
In this paper, we present piezoelectric co-doped (Mg,Hf)xAl1−xN thin films, where the dopant concentration x is in the range of 0–0.13. The (Mg,Hf)xAl1−xN thin films were prepared on Si (100) substrates with a dual magnetron with AC power applied between two ring targets. The compositions of the targets were pure Al and Al-Mg-Hf metals. The composition of the films was controlled by adjusting a DC...
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