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A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire substrates. The effect of film thickness and etching depth on the electromechanical coupling and velocity dispersion were calculated by finite element...
As more LTE bands are squeezed into the crowded global RF spectrum interference becomes a major concern. Some cases require profoundly steep transitions from passband to the tightly packed neighboring bands. The most demanding high frequency LTE bands may only be served with high-performance BAW resonators that have been temperature compensated to have essentially zero temperature drift. There is...
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