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GaAs BAW sensors using shear acoustic waves were developed for biological detection and quantification. The sensor consists of a 50–350µm thick membrane where thickness shear acoustic waves were produced with a lateral field excitation (LFE). The LFE electrode arrangement is located on one side of the membrane. The other side is dedicated for proteins or cells capture through a bio-functionalized...
Surface acoustic wave (SAW) devices can be used for various professional metrology applications such as wireless sensing of, e.g., temperature, pressure, and torque even in harsh industrial environments. Most of the conventional readers for resonant SAW sensors require a high-speed analog-to-digital converter and calculate the fast Fourier transform (FFT) in the digital domain to determine the resonance...
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