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Large-scale multi-frequency capacitive micromachined ultrasonic transducer (CMUT) arrays consist of thousands of closely packed interlaced large and small membranes for applications such as super-harmonic imaging, multi-band operation, imaging-therapy, contrast and photoacoustic imaging. An accurate nonlinear lumped equivalent circuit model including the effects of the self and mutual acoustic interactions...
We have developed a measurement-based modeling technique employing Keysight's X-parameter methodology for characterizing nonlinear behavior in thin Film Bulk Acoustic (FBAR) piezoelectric resonators and filters. As a pair of continuous wave (CW) tones at frequencies f1 and f2 are incident upon a resonator, a set of vector measurements of the resonator response are performed at each of the integer...
We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth...
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