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In this paper, a novel design of diaphragm based pressure sensor has been proposed, which may find its application in Intra Uterine Pressure Catheter (IUPC) system. The novelty of the device lies in the fact that it has got patterned slots over the top layer of the diaphragm similar to a chess-board pattern. This sensor is then compared with a plane diaphragm of same dimensions. In same range of input...
This paper describes a comparative study of sensitivity and non-linearity of conventional and bossed diaphragm piezoresistive pressure sensor along with a performance enhanced design. The proposed structures take into consideration corner compensation to avoid distortion of the mesa structure during fabrication of bossed diaphragm structure using wet bulk micromachining. Optimum piezoresistors locations...
Vibration energy harvesting is gaining attention due to abundance of vibration energy at most places and ability to generate power MEMS devices from microwatts to few millwatts. Piezoelectric energy harvesters are the most suitable for vibration energy harvesting due to simplicity in design, operation and fabrication in MEMS technology. Cantilever fixed from one end and seismic mass on the free end...
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