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Integrated microresonators based on SiN waveguides are an attractive platform for nonlinear optics. Here we present a new photonic Damascene fabrication process that solves common problems in SiN waveguide fabrication and demonstrate frequency comb formation.
SiN micro-resonators with a cross section of 3×0.6 μm2 and an FSR of 25 GHz were demonstrated with intrinsic Qs up to 17 million, showing frequency comb onset power as low as 5.6 mW.
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