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A terahertz detector composed of a metamaterial absorber and micro-bolometer sensor integrated in a standard CMOS process is presented. The prototype demonstrates an innovative, uncooled, low cost, compact terahertz detector that is readily scaleable to high resolution focal plane array formats. The detector imaging capability is demonstrated in a transmission mode experiment.
We present a new fabrication technique for silicon-based optically tunable metamaterial membranes. The realized bandpass filter is only 25 μm thick, enabling quasi etalon-free performance. The maximal amplitude transmission of the filter was 80 %, and an amplitude modulation depth of 94 % was achieved at 0.65THz using a 500mW strong modulation laser.
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