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Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5–0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4–5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2...
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