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The complex scattering process of the high-energy electron beams in resist is simulated by Monte Carlo method. The energy deposition distributions are presented under different exposure conditions. The three-dimensional (3-D) development profiles are obtained with the developing threshold model. It is found that, in the high energy range, higher electron beam energy, thinner resist, appropriate dose...
Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene...
Synapses are essential components for signal processing and transmission in the nervous system, whose function is affected in many brain diseases and disorders. We demonstrated the successful control of synapse formation by micropatterning of synaptogenic protein, neuroligin (NL). Interestingly, the presence of a hydrophobic GPI moiety, promoted NL's biological activity. Also, the micropatterns of...
The numerous electrical and mechanical properties with which graphene possess has paved the way into a new era of research and exploration. With many companies researching synthesization and transportation techniques there is a demand for the research of tailoring techniques for the future mass industrial usage of graphene within electronic devices. As such, we explore the efficiency, speed, and quality...
We studied the low energy (5.4 keV) He+ ion irradiation effect on the properties of chemical vapor deposited graphene transferred onto SiO2/Si substrate. For a small dose density of 4 × 1012 He+/cm2, both the G and 2D bands in the Raman spectra exhibit blue-shift and the intensity ratio of the 2D and G peaks decreases. The intensity ratio of the D and G peaks increases a lot as the dose density is...
In this paper, we elaborate on protocols for growing ZnO nanowires using different vapor deposition techniques to provide a comparative study for low temperature based deposition. Effects of various parameters ranging from process temperatures to material compositions were investigated. Growth from ZnO thin film seed layers and catalytic growth using Au nanoparticles were performed as well as growth...
A novel composite structure of WO3 nanowires/porous silicon has been successfully synthesized via a convenient thermal evaporation method without using any catalysts. The diameters and lengths of nanowires are 40–60 nm and 20–30 µm, respectively, and the aspect ratio (length/diameter) of nanowires could be in range of 500–750. The obtained products were investigated by scanning electron microscopy,...
In this study, the mutual electrolyte structure of arrayed flexible dye-sensitized solar cell (FDSSC) was used to decrease the internal impedance. The ITO-PET substrate was etched the conductive layer (ITO) by etching solution, which designed arrayed pattern. TiO2 thin film was fabricated on the arrayed conductive substrate by spin-coating. The arrayed flexible dye-sensitized solar cell with mutual...
In this study, suspended graphene clamp-clamp beam (SGCCB) as long as 100 µm was manufactured by FIB cutting. Large-scale graphene film was grown on Cu foil by CVD and transferred to DRIE defined silicon substrate. The influence of FIB cutting time and ion beam intensity on the pattern profile were investigated with an optimized processing recipe. The SGCCBs revealed a sharp edge, which can be used...
Two major issues that prevented organic substrates and interposers from achieving high VOs at fine pitch and dimensional stability are thermal expansion mismatches between material layers and requirement of low dielectric constant to improve signal transmission. Thermal dimensional stability is dependent on the difference in thermal expansion between the various materials in the package, the temperature,...
The tunable silver nano-pillar arrays were fabricated by using Electron Beam Lithography and direct current magnetron sputtering technique successfully. The as-prepared substrates retain an excellent Raman-enhancement characteristic. The developed process provides a reproducible and reliable method to fabricate the Surface-enhanced Raman Scattering substrate particularly for the high sensitivity biological...
Self-switching diodes have been fabricated within a single layer of indium-gallium zinc oxide (IGZO). Current-voltage (I–V) measurements show the nanometer-scale asymmetric device gave a diode-like response. Full current rectification was achieved using very narrow channel widths of 50nm, with a turn-on voltage, Von, of 2.2V. The device did not breakdown within the −10V bias range measured. This single...
In this talk, I will discuss our recent effort using synthetic micro/nanoengineered tools to study mechano-sensitive and -responsive behaviors of human pluripotent stem cells (hPSCs) and the underlying molecular and cellular mechanisms.
Thin-film infrared (IR) radiation absorbers are widely used in thermal detectors, and high IR absorption in a wide spectral range is critical to improve the sensitivities of the detectors. In this work, three types of thin-film IR absorbers were prepared and the absorption characteristics were tested. 1 µm thick Styrene Butadiene Styrene block polymer (SBS) decorated multiwall carbon nanotube (MWNT)...
Arrays of single-crystal zinc oxide (ZnO) nanowires have been synthesized on silicon substrates by vapor-liquid-solid growth techniques. The effect of growth conditions including substrate temperature and Ar gas flow rate on growth properties of ZnO nanowire arrays were studied. Structural and optical characterization was performed using scanning electron microscopy (SEM), X-ray diffraction (XRD)...
Drag reduction of liquid flows on solid/liquid interface has become an important issue with the development of microfluidics systems. Theoretical and experimental studies have shown that at the solid-liquid interface the presence of nanobubbles is believed to be responsible for boundary slip, and the size, quantity and distribution of nanobubbles on hydrophobic surface will influence the slip length...
Self-organized micro-/nanostructures are obtained by a combustion flame of ethanol and a mixture of ethanol and nickel acetate. Microscopic analyses of the depositions on glass slides and Si wafers reveal that a variety of micro-/nanostructures are formed in the shapes of quadrilaterals, hexagons, nanogears, nanotori, spheres and anomalous structures. Raman spectra show two peaks at ∼1352 cm−1 (D)...
We propose a novel tri-state inverter based on junction band-to-band tunneling (BTBT)-enhanced nanoscale CMOS structure. By suppressing the gate-induced drain leakage (GIDL) current, an additional stable state, “1/2”, can be generated with intermediate level from voltage dividing in series resistance of off-state n/pMOS. The high-speed performance of our proposed tri-state inverter has been estimated...
Carbon nanotubes (CNTs) are an ideal candidate for electrical interconnects due to their extraordinary thermal, electrical and mechanical properties. In this work, as-densified CNT bumps were applied as chip on film (COF) interconnection material. A silicon chip with patterned CNT bumps was bonded onto a flexible substrate using anisotropic conductive adhesive (ACA) with bonding pressure, at 127.4...
In this work, the theoretical analysis of an innovative polymeric strain sensor is proposed. In this device, composed of chalcogenide glass (As2S3) stripes, periodically repeated on a substrate of polydimethylsiloxane (PDMS), an applied strain stretches the soft substrate, altering the periodic arrangement of stripes and introducing a variation of the resonant peak of the optical response of the structure...
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