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Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined...
We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.
The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication.
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