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Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.
We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.
A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
We report a MEMS-based label-free protein sensor which utilizes nonlinear optical transmittance change by a Fabry-Perot interference to enhance the sensitivity of surface-stress. The MEMS protein sensor is composed by a silicon photodiode and a free-standing thin film with a nano cavity. A deflection of the thin film caused by an antigen-antibody reaction is detected by a photocurrent change. Theoretical...
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
A single-pixel spectral line imager based on a highspeed MEMS grating scanner is demonstrated to possess the capability of resolving 104 spectral bands and 250 spatial pixels. Delauney Triangulation is used in the signal processing to correct the spectral image distortions.
This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation),...
We demonstrate closed-loop control of a MEMS phased array using an optical interferometer designed for in-situ phase-measurement. Phase resolution is comparable with commercial interferometers and we achieve beamsteering without calibration.
We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D...
In this paper, design and fabrication results of ‘in-plane’ type MEMS mirror device driven by rotational electrostatic actuators with angle sensing ability are reported for the first time. This MEMS mirror realizes rotational motion of a vertical mirror mounted on the SOI actuator stage, which can deflect or switch the reflected light angle in parallel to the same chip surface. Since optical fibers...
This paper presents the fabrication, characterization and imaging results of a wide-scanning, low voltage driven and electrical discharge machining (EDM) process fabricated stainless steel micro-scanner based real-time confocal hyperspectral fluorescence microscope for skin cancer detection.
A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical...
Direct-write lithography holds the potential of revolutionizing micro-fabrication since it allows direct transmission of image data into the media, eliminating the time and cost of mask fabrication and maintenance. We have developed an 8192-channel direct-write spatial light modulator based on Grating Light Valve technology (GLV™, Figure 1). This diffractive linear array operates at UV wavelengths...
We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated...
A comb-drive actuated MEMS scanning mirror is used to actively Q-switch a side-pumped Nd:YAG laser. Minimum pulse durations of 38 ns are observed and maximum average output powers of 55 mW at 17.625 kHz pulse repetition frequency.
The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication.
The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.
A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.
The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.
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