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In2O3 thin film was fabricated using pulsed laser deposition technique. The structure and morphology of the thin film were characterized by X-ray diffraction and atomic force microscopy respectively. AC impedance of In2O3 thin film gas sensor were investigated at different temperatures (275 – 425 °C) when exposed into clean air and air containing NOx. Significant NOx sensing characteristics of thin...
Low temperature co-fired ceramics (LTCC)-technology, which is widely used for packaging and manufacturing high frequency RF components, is used for fabrication of micro-hotplates (MHP). Gas sensors produced using this technology leads to low power consumption (500 mW for 226 °C) due to low thermal conductivity (3–4 W/(m-K)). For small series, this technology is remarkably inexpensive compared to the...
Thin films of indium doped zinc oxide (In:ZnO) have been deposited onto glass substrates using a facile and inexpensive Spray Pyrolysis method. To reveal the effect of indium concentration on the gas sensing characteristics, thin films were synthesized using different concentration of indium in the precursor. X-ray diffraction (XRD) study indicates formation of crystalline phase of zinc oxide under...
Integrated SnO2: CuO thin-film based H2S gas sensor has been realized using low temperature co-fired ceramics (LTCC) tapes with heater and thermister buried inside the LTCC multilayer structure. The SnO2: CuO thin films are deposited on top of the structure. At operating temperature of 180°C, these films revealed sensing properties very similar to the reference films deposited on Alumina substrates...
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