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This paper presents a low-noise differential capacitive sensing circuit for omnidirectional microphone to detection accurate sound-source. The adaptive readout circuitry supports high-resolution signal acquisition from capacitive, resistive, voltage and current mode sensors. The chip was fabricated in TSMC 0.35um 2P4M CMOS process, its area is 2.31*2.39µm2, dissipates 6mW at 3.3V in a typical sensors...
This paper introduces a novel deterministic three-dimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method...
We experimentally package the microaphere coupling system using UV glue with low refractive index about 1.32. Experimental results demonstrated that the Q-factor of the packaged coupling system is about one order of magnitude lower than that of non-packaged sample but continuously tested to be 107 or 108. In microcavity application research, such as resonant microcavities optical gyroscopes, this...
The electroosmotic flow (EOF) velocity control in a wall-less virtual microchannel is successfully demonstrated here by liquid dielectrophoresis (LDEP). The geometry of the virtual microchannel was determined by the electrode patterns on both top plate and bottom plate. The device is a sandwich structure consisting of hydrophobic layers, dielectric layers, ITO glass plates, and liquid. Neutral fluorescent...
As an emerging technology, bulk titanium DRIE enabled devices are very attractive for in vivo and harsh environments applications. As the functionality, mobility and reliability of the micro components highly depend on the quality of microstructures, a physical etching model is necessary for better control of the DRIE profile, in which knowledge of the ion angular distribution in chlorine plasma is...
Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle...
We show how to extend electrokinetic tweezing, which can manipulate any visible particles and has more favorable force scaling than optical actuation enabling manipulation of nanoscale objects to nanoscopic precision, from 2-dimensional control to the third dimension (3D). A novel and practical multilayer device is presented that can create both planar and vertical flow and electric field modes. Feedback...
This paper reports a design, fabrication, and experimental results of a lamination micromixer with a newly added middle partition plate for efficient mixing. The lamination mixer was simply fabricated in a silicon wafer by double side DRIE processes and combination masks of silicon dioxide and photoresist. The mixing chip contained 10 steps lamination mixer which split a solution to upper and lower...
A novel modeling approach, support vector regression (SVR) combined with particle swarm optimization (PSO), was employed to construct mathematical model for prediction of the purity and average particle size of hydroxyapatite (HA) based on five synthesis process factors, including the P2O5 content, Ca(NO3)2·4H2O content, aging time, synthesis temperature, and holding time. The accuracy and reliability...
In order to investigate the influence of experimental condition on the catalytic effect of prepared KF/Al2O3 nano-composite catalyst in terms of the Knoevenagel reaction, support vector regression (SVR) combined with particle swarm optimization (PSO) algorithm is adopted for generating a numerical model to predict the yield of resultant 2-cyanide-3-phenyl ethylacrylate under different dosage of KF·2H...
Support vector machine (SVM), which is a novel technology for solving classification and regression issues, has been successfully used in many fields. In this study, according to an experimental dataset on the average grain size of Fe3O4 nanoparticles, a predicting and optimizing model using support vector regression (SVR) was developed. In this model, the estimated result of SVR agreed with the experimental...
In this paper, a novel application of carbon nano-coils (CNCs) as intracellular nano-robots is described. Nano-robots made of CNCs were successfully fabricated and dispersed in water by coating them with 2-methacryloyloxyethyl phosphorylcholine (MPC) polymer. The CNCs had a diameter of 700 nm, thickness of 250 nm, and pitch of 350 nm. The nano-robots were made to swim in a medium by applying a uniform...
A novel approach for cross-plane thermal conductivity and diffusivity measurement in thin-films by combining steady state comparative-longitudinal heat flow method (SCHF) and the Angström method is reported. A thin specimen was sandwiched between two identical metal cylinders; thermal wave was introduced from the lower cylinder and crossed through the specimen then passed to the upper cylinder where...
We utilize the parylene pocket technology and develop a novel integration scheme that will allow us to connect more than 100 bonding pads on an area less than 5 mm × 5 mm with high efficiency. This packaging technique can also house any IC chip or discrete component and provide electrical connection to it. Here we use squeegee technique to connect each pad on the chip with the bonding pad on the pocket...
A modified Prandtl-Ishlinskii (PI) model, referred to as an asymmetric PI model, is implemented to reduce the displacement error between the model and the actual trajectory of a piezoceramic actuator used for AFM-based nanoscale imaging. The fact that the standard PI model is symmetric, while the actual hysteresis loop of a piezoceramic actuator is asymmetric, assures scanning errors if the standard...
The sol-gel solution was mixed by tetraisopropyl orthotitanate (TTIP), acetonylacetone, distilled water and alcohol at various molar ratios and coated on p-type silicon substructure for titanium oxide formation. Then the CO2 laser annealing in air at powers of 0.5, 1.5 and 3.0 W in the defocus mode was performed on the coatings for studying crystallization of titanium oxide. The microstructure and...
A study on the design and implementation of a fluxgate magnetometer's sensing circuits based on the time-domain output waveform of a micro fluxgate sensor is presented. According to earlier studies, the frequency and amplitude of excitation voltage, and the hysteresis loop of core material are the major factors to determine the field-to-voltage transfer coefficient of the fluxgate. The fluxgate features...
Nanomanufacturing refers to the manufacturing of products with feature dimensions at the nanometer scale. This paper presents the fundamental concepts and key issues of computational lithography and computational metrology for nanomanufacturing. We demonstrate their potentials and challenges by providing several examples carried out in our research group. We believe and expect that they will play...
Laesr stimulated electron field emission from a sharp gold tip under continuous-wave (cw) laser irradiation at the plasmon-resonant wavelength are investigated. A gold-coated tungsten emitter with a tip radius of 100 nm which has the plasmon resonant wavelength at 530 nm is used. I–V characteristics of the tip under laser irradiations at 442, 532, and 633 nm were measured. TE-polarized 532-nm irradiation...
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