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This paper demonstrates a catalyst-free synthesis of ZnO nanostructures using platinum microheaters under ambient environmental conditions. Different morphologies of ZnO nanostructures are synthesized from the oxidization of Zn thin film by local heating. The synthesized ZnO structures are characterized by the SEM, EDX and Raman spectra. The characterization of two shapes of Pt microheaters is investigated...
The processes of fabricating the etch mask for a glass dry etching are complicated and require high cost. To reduce these disadvantages, we suggest a novel glass dry etching method using a single photoresist mask. In this work, we figured out the optimized condition for the glass dry etching using a photoresist without any metal or silicon mask. We observed the characteristics of quartz wafer, such...
In this paper a kind of wireless networks wind sensor, based on micro wind velocity chip and electronic compass, is introduced. The micro wind velocity chip, which is fabricated with MEMS technology, is designed based on drag force and thermal principle. When the output of micro wind velocity chip is max value, the wind sensor obtains wind velocity and direction by measuring the value of micro wind...
Circulating tumour cells capture and counting on microfluidic device is a research focus during these years. In order to develop a magnetic cells capture chip with lower cost and better conveniency, We present a novel fabrication process of magnetic micropillar chip with Fe3O4 powder directly padded into master and encapsulated in PDMS replicate. The micropillars deliver strong magnetic gradient under...
A thin-film inductor with Ni0.3Cu0.1Zn0.6Fe2O4 film for the RF range is fabricated by using IC compatible processes, which is composed of SiO2 insulating layer / NiCuZn ferrite film layer / SiO2 insulating layer / Cu coils. The magnetic properties of Ni0.3Cu0.1Zn0.6Fe2O4 thin film are discussed. High frequency performances of the micro-inductor are measured using network analyzer from 50MHz to 9GHz...
Metallic nanocones are particularly interesting recently for the electromagnetic field concentration occur near sharp tips, but the fabrication is still a problem for their application. In this paper, a simple self-assembly based templating approach was presented for the fabrication of ordered gold nanocone arrays. The double-layered silica colloidal crystal was utilized as etching masks to develop...
During EMT (Epithelial mesenchymal transition), cells are under large shape change. The ingress of the cell relies on the debonding between adjacent epithelium and the flexibility change of them. In order to elucidate the mechanical involvement of EMT, it is necessary to investigate the mechanical properties, cell compressive stiffness and extensibility and the adhesion strength between them. The...
In this study we present the synthesis of the large-area Ta2O5 nanodot array by utilizing hot filament metal vapor deposition technique. The Ta2O5 nanodots were arranged in a large-area array on a Si wafer, and their average diameter is ∼ 35 nm. X-ray photoemission spectroscopy (XPS) revealed the stoichiometric Ta and O compositions of Ta2O5 nanodots. Raman spectroscopy showed the Ta2O5 nanodots to...
This paper presents a common platform for packaging micromachined devices, such as motion sensors, microphones, actuator RF switches etc. The method utilizes the semiconductor process, MEMS technique and Electroless technique to build the CMOS-MEMS chip and the second chip, which are then bonded together face to face. Herein, the second chip can further contain Micro Controller Unit (MCU) or antenna...
We fabricated carbon nano-partitions (CNPs) which vertically standing on the metal substrates by radio-frequency magnetron sputtering for dissipating heat applications. Considerable enhancement of the conductive heat transfer has been confirmed and the enhancement depends on the spacing density of nano partitions. The optimum nano-porous density could enhanced the heat transfer when the lower density...
This paper reports transient equivalent circuit analysis for self-induced oscillation of micromechanical resonator using a novel component model of an electrostatic comb transducer. The model with built-in displacement detection can analyze dc operating points which depends on both on electrical and mechanical biases. By using the proposed model, we analyzed the bias voltage dependency of oscillation...
We present a portable microendoscope based on a microelectromechanical systems (MEMS) scanner, compound gradient refractive index micro-lenses and a photonics bandgap fiber (PBF). It overcomes the size (2.0 × 1.9 × 1.1 cm3) and weight (less than 3 grams) limitations of conventional two-photon fluorescence microscopy toward freely moving subjects. The microendoscope utilizes a photonic bandgap fiber...
Based on UV-LIGA technology and the hot embossing method, a novel controlled drug delivery micro-system is proposed in this paper, which is made by biodegradable polymer and suitable for subcutaneous implant releasing drug targeted. The fabricating processes about using molds and the microstructure are introduced, and then, experiments are conducted to investigate the influence of the embossing time,...
Cyto-analysis of rare cells often requires separation and detection with either procedure possesses substantial challenge. This paper presents a disk-based microfluidic platform for both procedures via immunomagnetic negative selection process. Proof-of-concept was conducted using wide range of MCF7 as target rare cells and spiked into Jurkat as non-target cells. Then, mononuclear cells (MNC) from...
We present a humidity sensor with a constant temperature measurement mechanism to ensure both the elimination of the ice on the surface of the sensor and the controllable temperature of the sensor chip in the low ambient temperature condition. In this humidity sensor, the capacitive type humidity sensitive unit is located at a suspended membrane, and the lower electrode of humidity sensitive unit...
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