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The paper reports a GaAs cantilever-mass based on the electromechanical coupling characteristics using pseudomorphic high electron mobility field effect transistor (PHEMT) as the sensitive element. The GaAs PHEMT is embedded in the root of the cantilever to detect the nanometers deformation. The results indicate that the piezoresistive coefficient and sensitivity of microstructure strongly depend...
Experimental study of electroporation of bone marrow mesenchymal stem cells (MSCs) at the single-cell level was carried out on a micro EP chip by using single electric rectangular pulse. The threshold values of the electrode potential and pulse width for gas bubble generation on the micro electrodes due to electrolysis of water were revealed as 4.5 volt and 100 µs, respectively. Quantitative EP study...
Collective cell motions play essential roles in the regulation of various complex biological processes such as embryogenesis, tissue regeneration, and carcinogenesis. In this study, we present a novel plasma lithography technique for creating surface functionalized confinements toward the investigation of collective cell migration. The ability to confine cells one-dimensionally using plasma lithography...
A microhotplate based catalytic combustion gas sensor with low power consumption employing Pd-Pt/ γ-Al2O3 is presented in this paper. The microhotplate was fabricated on a silicon substrate by micromachining process. And the sensitive material Pd-Pt and compensation material γ-Al2O3 were prepared by sol-gel process. This sensor has been tested under constant working voltage to methane gas and achieved...
We present a dielectrophoretic continuous flow sorter using planar micro-electrodes coupled to a SU8 channel constriction. This novel design, relying on a simple fabrication process using SU8 dry film lamination to seal fluidic channels, enables a high sorting efficiency at low voltages. Our device was used to continuously sort 10µm and 5µm latex beads with less than 2% errors at flow speeds of 100µm/s...
The research of individual cells is an important technique in many kinds of biological study. In addition, cell impedance analysis is an effective way of biological measurement. Therefore, integrating the measurement technique into the single-cell trapping structure is the aim of this work. This study presents a cell manipulation and measurement microchip to achieve a precise positioning which uses...
Ionic polymer-metal composite (IPMC) is a promising electro-actuated polymer which can be used in MEMS devices because of large deformation with low applied voltage. We propose a convenient grey box model based on known mechanical properties of metal and Nafion® including Young's modulus and Poisson's ratio. 3D structural solid element type (solid 45 in Ansys®) is used in finite element method (FEM)...
Lead zirconate titanate(PZT)/IPN piezoelectric composites with 0–3 connectivity consisting in PZT ceramic powder with nanoscale and Interpenetrating Polymer Networks(IPN) matrix were prepared through solution mixing method. The composites were polarized at 130 °C for 45 min under the electric field of 6.5 kV. The relationship of the preheating temperature of PZT and the electrical properties were...
Opas TrithaveesakA deformable grating light modulator (GLM) also known as a grating light valveTM (GLV) offers fast switching time, low loss, and potential simplicity in fabrication, which are desirable for free-space optical switching systems. The purpose of this paper is to report on the fabrication of a GLM using standard CMOS technology and its simulation results, for use as both a de-multiplexer...
Integration of Micro PCR (Polymerase Chain Reaction) with CMOS(Complementary Metal Oxide Semiconductor). EC (Electrochemical) detection are investigated. A stationary μ PCR chip with micro EC electrodes inside the reaction chamber is realized in a common microsystem technology platform. A special EC process was used to investigate the direct detection of DNA solution concentration without any labeling...
A fast and simple approach to create silicon nanostructures using metal-assisted etching is reported. Effect of catalyst metal layer thickness on silicon nanostructure morphology was investigated in this study. Au and Ag with thickness of 3 nm, 5 nm and 10 nm were used as the metal catalyst layers to study the effects of metal catalyst thickness on silicon nanostructure morphology. The experimental...
In this paper, a label free approach of the DNA hybridization detection by the guided-mode resonance (GMR) spectroscopy sensor is presented. The GMR biosensor can easily detect any slight variation of the DNA hybridization by the resonant wavelength peak shift. The corresponding peak wavelength shifts of the capture DNA, the target DNA and the probe DNA serially hybridized reactions from GMR are measured,...
The principle of gas-flowing assistant growing of carbon nanotube is described in this paper. The effect of gas-flow was analyzed with numerical simulation, which can give some instruction for the self-aligned growth of carbon nanotube. Scanning electronic microscopy (SEM) images demonstrate that the self-aligned carbon nanotube can be realized by a gas-flowing CVD process and the distribution of...
This paper presents the energy conversion theory of radioisotope battery and analyzes the effects of a three-dimensional (3-D) silicon p-n diode with cylindrical hole array on the electrical-output parameters. An equivalent circuit model for direct radioisotope-energy conversion battery has been established. We derive the mathematical equations of short-circuit current, open-circuit voltage and maximum...
In this study, dielectric nanoparticles, Al2O3 (10∼30nm), are trapped and immobilized on an indium-tin oxide (ITO) glass substrate by an atomic force microscope (AFM) based on dielectrophoretic (DEP) force. In the simulation results, the DEP force decreases rapidly away from the apex of the AFM tip, and the effective depth is only about 20µm. Therefore, an open reservoir with a 20µm depth is fabricated...
Micro/nano fabrication of magnetic materials is becoming a crucial technology for future magnetic systems/devices such as high-density magnetic recording heads, high-density patterned media, magnetic quantum devices, and micro/nano magnetic smart systems, etc. In our previous work, NiFe alloy with the highest saturation magnetic-flux density was selected as the micro-magnet for detecting the feasibility...
Optical microresonantors are widely researched for a number of applications, especially microcavity-based sensors. However, the transmission characteristic is prone to be affected by the surrounding. In this paper, a novel method to isolating the microcavity coupling system is presented. The Selection principle for packaging material is discussed and the details of packaging process are introduced...
Synthetic Jet Actuator (SJA) is a new type actuator for active flow control applications. A Piezoelectric Micro SJA based on MEMS technology was present in this work. The simulation of device performance was carried out through a multi-domain coupled analysis model, and the relative error of jet velocity between simulation results and experiment data is less than 8%. A batch fabrication process was...
Surface acoustic wave (SAW) atomization has been found to be a rapid and efficient way for generating micron or submicron aerosols within a controllable fashion. The SAW atomizer is small and light-weighted, attractive for many applications, especially for pulmonary drug delivery and biomicrofluidics. Control the sizes of the aerosols generated by SAW is crucial for successful applications. Unlike...
We present microlens array (MLA) with various structure and arrangement in long focal length (millimeter range) based on thermal reflow process. The microlens focal length is usually in the same order of lens diameter or several hundred microns. To extend the focal length, we made a photoresist MLA covered by Polydimethysiloxane (PDMS) film on a glass substrate. Because the refractive index difference...
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