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We have fabricated Si-nanowire (Si-NW) based ion-sensitive field effect transistors (ISFETSs) for biosensing applications. The ability to prepare a large number of sensors on a wafer, standard silicon microfabrication techniques resulting in cost savings and potential sensitivity are significant advantages in favor of nanoscale ISFETs for future biosensor requirements. The Si-NW ISFETs were produced...
In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S)...
This paper presents the concept, design, and diffusion experiments of a new type of MEMS corrosion sensor based on Nano-Particle Polymer Composites as the sensing element. The concept of using MEMS for in-situ corrosion sensing for long-term applications have been proposed recently by our research lab. Past developments in the microfabrication of polymers have enabled the ability to pattern micro-...
This work demonstrates a microfluidic platform to study and differentiate avian red blood cells infected to various degrees by the malaria parasite Plasmodium gallinaceum. The preliminary finding points to the feasibility of using the morphological changes on the surface of the malaria infected avian RBC (miaRBC) as biomarkers for diagnosis. By embedding a glass substrate with a controlled surface...
A novel three-step DRIE recipe with pulsed low frequency platen power of 380 KHz is proposed in this paper. The depassivation time/duty cycle and the etching time/duty cycle of the pulsed low frequency platen power in the etching step of Bosh process are experimentally studied through the silicon on glass process (SOG) of a micro-gyroscope. Experiments show that the recipe with a passivation time...
This work reports a new wafer-level post-CMOS process with double-side DRIE for fabricating high-sensitivity, thermally stable capacitive accelerometers. The resultant sensor structures have high aspect ratio (beams with 2.5 µm gaps and 56.2 µm beam thickness comprising 5 µm metal-oxide layers and 51.2 µm single-crystal silicon layer) and show the insensitivity to residual stress and temperature change...
This paper presents a frequency controlled ultrasonic microfluidic chip producing acoustic stream and standing waves for rapid particle manipulation. The developed chip fully made of SU-8 can effectively couple ultrasonic waves produced by PZT element to perform mixing and separation. Moreover, using varied frequency to manipulate ultrasonic in different geometry reactors, versatile particle motions...
This research studied the environment temperature affect to alcohol detecting and heated carbon nanotube film after alcohol detecting for a good chemical sensor application. The results showed that at the environment temperature below the room temperature (in this work −5 °C), the percentage of resistance changing is 15.70 % while at the 85 °C is 3.35 %. The heated CNT film after alcohol absorption...
This paper presents a method for characterizing the thin glass-glass bonding process for the fabrication of nanofluidic channels with depths down to the nanometer scale without cost-expensive lithography. Nanofluidic channels were fabricated on a substrate of borosilicate glass (coverslip, thickness of 160 µm) using the buffered oxide wet etching process, and preheated in a furnace at 400 °C with...
This work presents a means of active actuation of the suspension structure with a holographic optical element (HOE) for the small-form-factor (SFF) optical-disk drives. The proposed HOE module sensor is mounted on a swing arm swivel-drive mechanism with unique features, including a rotary actuator for tracking and a swing arm nutates along a pivot for focusing. The fabrication methodology for a cantilever-beam-like...
This paper presents a study of effect of deflection length and emitter width on sensitivity of magnetotransistor. The device has been fabrication on standard CMOS technology. It can detect magnetic field applied vertically to the chip. The structure consists of emitter (n-type), base (p-type) and collector (n-type) on silicon p-substrate. The device can sense magnetic field by Hall Effect theory and...
This paper reports a novel method for the in-situ hydrogel membrane fabrication in a simple PDMS channel. We used two separate solutions of 0.0625 wt% of H2O2 in PBS with the 5.2 wt% of the Tetronic-succinic anhydride-tyramine (Tet-SA-TA), and 0.0625 mg/ml of horseradish peroxidase (HRP) in PBS with the same concentration of Tet-SA-TA. These two solutions were introduced into the typical microfluidic...
To obtain high resolution, high signal-to-noise ratio (SNR), high reliability and real time in wide spectral range, we study the space modulation Micro Fourier Transform Spectrometer (μFTS) based on multi-step mirrors covering the spectral range of 3–5µm and 8–12 µm in theory and experiment. The influences of spectrum reconstruction caused by the diffraction and extended light source in Fourier Transform...
Configurable assembly technique of a DNA origami tile on Micro Electromechanical Systems (MEMS) using a microfluidic device to realize a Nanosystem was proposed. In this newly proposed approach, multiple DNA origami tiles fabricated by DNA origami technique are utilized as a sub-micro-scale functional building block on which nano-materials such as nano-particles and SWCNTs are assembled by DNA hybridization...
A DNA hybridization sensor using pentacene thin film transistors (TFTs) is an excellent candidate for disposable sensor applications due to their low-cost fabrication process and fast detection. We fabricated pentacene TFTs on flexible substrate for the sensing of DNA hybridization. The 100 mer ss-DNA (poly A/poly T) or 100 bp ds-DNA (poly A/poly T hybrid) are deposited from a solution on pentacene...
A new type of micromachined electrostatic field sensor (EFS) that can be used to measure atmospheric field has been demonstrated in this paper. The sensor structure is designed to work at resonant frequency for maximum sensitivity to electric fields. SOI (Silicon on Insulator) micromachining technology was used to fabricate the sensor. The sensing area of this sensor is only 5mm×5mm and it requires...
Lithium batteries are commonly used in mobile phones, personal digital assistants (PDA), notebooks and other computer, communication and consumer electronics (3C) products. Lithium batteries in 3C products or electric vehicles must rapidly charge and discharge. Thus, the inner temperature increases rapidly, which is a safety issue. Conversely, over charging results in unstable voltage and current...
This paper presents a tunable RF MEMS filter based on the equivalent circuit of three-pole band-pass filter. The band-pass filter was manufactured on a standard low-resistivity substrate using MetalMumps fabrication process. To realize changeable frequencies and achieve high RF performance, the band-pass filter was adopted a suspended tunable capacitor, whose bottom plate was suspended 25µm from the...
A novel ODEP (optical dielectrophoresis) chip using a polymer photoconductive material and fluorine doped tin oxide (FTO) conductive film is demonstrated to manipulate micron-sized polystyrene beads. Instead of using the traditional hydrogenated amorphous silicon (a-Si:H) as photoconductive layers, a thin film of a mixture of poly (3-hexylthiophene) (P3HT) and [6,6]-phenyl C61-butyric acid methylester...
Fluid dynamics and mixing transport of an advanced rhombic micromixer with branch channels have been designed and investigated by 3D numerical simulations and experiments. The CFD-ACE+ software was used for simulation and PDMS molding process was used for chip fabrication and experiment. Simulation results showed the advanced rhombic micromixer with branch channels enhanced much high mixing efficiency...
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