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In recent years, zinc oxide (ZnO) semiconductor have attracted much attention. Amorphous silicon thin film transistors are currently processed at a high temperature (>600 °C), with low mobility, but cannot be used in flexible electronics. Other organic thin film transistors were fabricated at a low temperature with middle mobility, but had a short life. This study used a bottom gate structure,...
A novel layer-packed In2O3 nanostructure and its application in gas sensor for the detection of indoor air contaminants were reported. The special In2O3 nanomaterials were prepared by annealing In2S3 precursors synthesized via a surfactant-assisted assembly route. The influencing factors towards the morphology of In2S3 precursors were also investigated. In gas-sensing measurements, typical indoor...
Nanopores are increasingly utilized as tools for single molecule detection in biotechnology. We report a novel method of fabricating a nanopore by thermally pulling a glass micropipette sealed with the paraffin to form a nanocavity enclosed in the terminal and then rubbing the terminal to make the cavity throughout. The principle is based on the physical footprint of the paraffin gaseous substances...
Some properties of living cells are associated with cell adhesion and cell spreading process. Traditional way to monitor cells' morphological changes is usually the use of optical microscope. Biosensors provide an alternative to automatically monitor cell adhesion and spreading process. This study utilized microelectrodes array based impedance biosensors to record cells attachment and differentiation...
In this paper, in order to reveal the interrelationship among the imprinting pressure, the evolution profile and the mold deformation, a novel numerical model accounted for surface tension and contact angle was established to simulate the resist filling process and mold deformation by using computational fluid dynamics(CFD). As a basic study to understand the resist filling characteristics in UV-NIL,...
Combinational Ag nanoparticle assembly substrates with multi-graded nanoparticle densities were fabricated through a dynamic shadow deposition of a collimated cluster beam in oblique incidence. The substrates were used to investigate the interactions between the surface plasmons of the Ag nanoparticle arrays and fluorescent molecules. Rhodamine 6G molecules directly adsorbed on the substrates show...
Surface acoustic wave sensors are famous for its low cost, high resolution, and quick response time. In this paper, the SAW gas sensor for detecting low concentration of NH3 was presented. The gas sensor array is composed of 2×2 non-continuously working oscillators equipped with one reference SAW sensor and three SAW sensors coated with different polymers. To improve the selectivity and sensitivity,...
A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly designed and realized. Unlike the conventional peristaltic pumping configuration, the micropump consists of two stacking layers of PDMS on a glass slide. This sandwich-type structure builds up two chambers. A thermopneumatic actuation chamber consists of a heater on the glass slide; the other fluid chamber is connected with...
Development Synthesizing Diamond film on (100) silicon substrate was processed by HFCVD (Hot Filament Chemical Vapor Deposition). The processes consisted of using methane (CH4) to produce intrinsic diamond and then constructing MSM device on the diaphragm of diamond film. Schotthy junctions on the top and the lower of the diaphragm were produced by aluminum which caused the carriers were able to move...
Low power consumption device can be realized by low junction leakage current. This leakage current relates to the defects in the depletion region of p-n junction. Among variety process steps, implantation step may generate defects. Therefore, the implantation-induced defects have been studied from the activation energy which has been obtained from the leakage current of p-n junction. The different...
In this study, a series of colloidal ternary semiconductor ZnxCd1−xS nanocrystals are prepared. By controlling the ratios of Zn and Cd, the optical properties of the nanocrystals are modified. When Zn content is 0.5 and 0.8, their PL spectra exhibit two obvious emission peak, in which the narrow and the board bands are attributed to the band-edge and surface state emissions, respectively. Moreover,...
The present study focuses on implementing a novel CMOS-MEMS thermal switch by using commercially available TSMC 0.35 µm two-poly four-metal (2P4M) CMOS process. There are two novel designs in this paper: first, the soft contact structure and post-processing fabrication; second, a new design of thermal actuator. To create the soft contact structure, residual stress effect has been utilized to make...
The preparation of macroporous polystyrene films with regular voids and the characterization of their diffractive optical properties are reported in this paper. These materials were synthesized using a colloidal crystal template of silica microspheres; the air between the spheres was replaced by the polystyrene; the template was removed by treatment with hydrofluoric acid. Scanning electron microscopy...
The increasing need for functionality and portability in consumer electronics is pushing the microelectronics industry to develop more effective interconnection techniques. This has resulted in the birth of 3D stacking of chips, which is achieved by the use of TSV (Through-Silicon-Via) technology. This paper puts forward a TSV simulator, FASTsv (Fast and Accurate Simulator of TSV: FASTsv). The key...
This paper presents a fabrication technology of “Black Silicon” with superhydrophobicity and wide-band properties based on an improved deep reactive ion etching (DRIE). By optimizing the fabrication parameters, including gas flows, pressure, platen power and etching/passivation time ratio, we have obtained dense arrays of nanopillars with an average diameter of ∼400 nm and height of 2–2.5 µm. The...
We presented a grating-coupled surface plasmon resonance (SPR) biosensor with a circular fluidic channel on a grating disc. Test solution can be moved forward in the fluidic channel by gravity through turning the grating disc. It can react with the probe molecules on the different sensing surfaces in the following the sequential time. In order to identify the angle changes of SPR due to the molecular...
This work presents the characterization of an innovative micromachined 2×2 optical switch monolithically integrated with variable optical attenuators. The device uses bi-stable mechanisms for optical switching, and can be easily realized by a standard manufacturing process with a single photo mask. Also, the split-cross-bar design (SCB) is employed as the optical path configuration. The results by...
This work investigates the optical responses at magnetic polariton (MP) excitation that is affected by lossy material characteristics (LMC) in nanoscale slits array. First of all, the nonideal capacitor fitting constant c1 in LC circuit model for various slit thicknesses is tuned to achieve better predictions at normal incidence. Second, the interactions between MP and LMC are further analyzed in...
Neopterin is a catabolic product of guanosine triphosphate (GTP), a purine nucleotide. In human biological fluids such as urine, neopterin concentrations indicate the activation of cellular immune activation under the control of T helper cells. High neopterin concentrations in body fluids such as serum or urine also indicate the activation of cellular immunity, which is associated with the reaction...
This paper presents a novel control strategy for the drive loop of microgyroscope based on two degree-of -freedom (2-DOF) PID controller. Compared with the conventional AGC-1DOF PID controller, the proposed AGC-2DOF PID controller can realize self-oscillation of the microgyroscope with improved transient response by moving some portions of the proportional and the derivative components of the single...
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