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Micro diffuser/nozzle pump are widely used in μTAS. As the diffuser/nozzles are the key parts for micro diffuser/nozzle pumps, this paper reports a novel method for improving the flow efficiency by adding micro/nano fins on its sidewall. The fins are arranged on the sidewall in the diffuser direction. It has been testified that the big fins (20μm) can improve the flow efficiency by 10 percent both...
Microscopic interferometry can be applied in the step height evaluation with sub-nanometer vertical resolution. This paper describes the effect of outside vibration on the evaluation process through many experiments. A micro actuator with high accuracy is used as the simulation of outside vibration. Experiments are done on the system with different vibration amplitudes, vibration frequencies and phase...
The experimental characterization for metal-insulator-semiconductor (MIS) capacitor by using the capacitance versus voltage (C-V) measurement is used to investigate the characteristics of dielectrics discharging in capacitive micro-actuator. The Al/SiNx/n-Si capacitors were prepared for experimental measurement. The charge relaxation characteristics were obtained by the C-V measurements after different...
We present a novel MEMS-based power generator using activation of cardiomyocytes. Cardiomyocytes are cultured on the MEMS fabricated lead magnesium niobate-lead titanate (PMN-PT) single crystal diaphragm, directly and the mechanical stress induced by contraction forces from cardiomyocytes is conversed into electrical power. This PMN-PT single crystal diaphragm has one-side interdigitated electrode...
A simple method was proposed to reduce the critical voltage of electrospinning and gain finer nanofiber. Beside the collector, a ground inducing plate was introduced into the electrospinning experiment setup, and the distance between spinneret and inducing plate can be adjusted. Under the same applied voltage, the electrical field strength around the spinneret increase as the distance between spinneret...
A novel nano electro mechanical system (NEMS) accelerated sensor which is based on a Pseudomorphic high electron mobility transistor (PHEMT) device with GaAs/AlGaAs/InGaAs is fabricated and demonstrated in this paper. The characteristics, including sensitivity and linearity of the studied device with different drain and gate bias voltage of PHEMT device, are measured and studied. Measured by the testing...
In this paper, it is researched that how I-V characteristics and piezoresistance coefficient of GaAs-based HEMT-embedded accelerometer change when different temperatures are set. It is shown that saturation current of device would go down if the temperature goes up, which is about 3.1467mA/°C, based on the research. However, the device can work well at the temperature range of -50°Cto 50°C, which...
For the first time, a metal-insulator-semiconductor (MIS) device that consists of silicon (Si) nanocrystals embedded in a silicon oxide film is proposed to investigate how the charge accumulation and relaxation can be manipulated by the nanocrystals for high reliable capacitive RF MEMS switch. A tri-layer structure, used as the insulator in our MIS device, comprises a thicker (about 100 nm) rapid...
In this paper, the p-poly-Si/Al thermopile infrared detector, with a single layer of low-stress SiNx membrane, instead of previous designed thin sandwich layer membrane of SiO2-Si3N4 is presented. Meanwhile, we investigate the influence of carbon-black coating on the output response of the detector. Infrared (IR) transmission spectra measurements made on absorbing area of the detector with carbon-black...
To enlarge the dynamic measurement range and improve the performance by reducing the influence of the main noise including thermo-mechanical noise, 1/f mechanical and tunneling noise, Johnson noise, and shot noise, tunneling sensors usually are operated in a closed-loop mode. Under the assumption that these noises are approximately Gaussian and the tunneling current/gap exponential relationship can...
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