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We have developed a new electronic nose based on a gas sensor array to detect organic vapors. The gas sensor array is based on 2×2 non-continuously working oscillators equipped with differently polymer-coated surface acoustic wave (SAW) sensors. The SAW detection system which is employed to detect various organic molecules in a static system was prepared using 99.8 MHz two-port SAW resonators and...
Reported here is a high-performance resonant micro-cantilever sensor with integrated micro-heater for both optimal resonance-excitation and speed-up analyte desorption after detection. By optimized designing the integrated heating-resistor, ultra-stable resonant frequency is measured that helps to realize a high resolution of mass detection. 130fg mass resolution is realized in atmospheric air with...
This paper presents a CMOS capacitive sensing amplifier for a SiC MEMS capacitive pressure sensor. Noise performance and noise optimization studied from a theoretical point of view. This amplifier is a differential difference amplifier (DDA) with optimal transistor sizing to minimize sensor noise floor. The simulation result shows that the circuit can obtain a stable and linear voltage, and Continuous-Time...
A technique for the fabrication of planar silicon nanowires (SiNWs) on SIMOX-SOI (Separation by Implanted Oxygen-Silicon on Insulator) wafers using sidewall transfer lithography is presented, which can be used as field effect devices for biomolecular detections. Different from the existing synthesis process, this method is based on standard “top-down” semiconductor process. Aluminum sidewall is applied...
We present a microfluidic based interstitial fluid (ISF) transdermal extraction tool fabricated from polydimethylsiloxane (PDMS), designed towards the application of continuous glucose monitoring. This device consists of a Venturi Tube for vacuum generation, chambers for the introduction of ISF and normal saline solution, pneumatic valves for fluid control, and interconnected microchannels. Vacuum...
In this paper, microgyroscopes using fully decoupled structure (FDS) and partially decoupled structure (PDS) were designed. They both consist of dual proof mass, sense frame and drive frame structure. Sense frame is directly anchored on the substrate in FDS. The cross talk between drive mode and sense mode was investigated. The ANSYS software has been used to simulate two types of decoupled Z-axis...
Surface acoustic wave (SAW) sensor is generally known as high-resolution mass-sensitive transducers. We developed a novel SAW sensing array based on 2 × 2 non-continuously working oscillators equipped with differently coated SAW sensors, respectively, which is used to analyze organic compound gases. The sensing array consisting of four two-port SAW resonator sensors with a fundamental frequency at...
The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference. A structure-decoupled dual-mass MEMS(micro-electro-mechanical system) gyroscope is studied in this paper, which can realize the full decoupling of the driving mode and sensing mode. In order to improve the performance of the dual-mass...
An experimental study was carried out to evaluate the performance of a polydimethylsiloxane (PDMS) based micromixer for heterogeneous immunoassays of insulin. The detection method is based on coupling the highly specific double-antibody sandwich immunoassay with the sensitive chemiluminescence of the Luminol-Hydrogen Peroxide reaction. Both the immune and chemiluminescence reactions are conducted...
A structure of TiN double resonant beams pressure sensor is presented, the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure. In this paper, the maths model of sensitive structures of the resonant sensor is established, through the analysis and numeration from the theory, and simulation by the ANSYS software, the varied extension...
This paper presents a supplementary system for rehabilitation, which is based on the wireless accelerometer network and integrates with remote monitoring and cross-platform intelligent terminal. System features are analyzed, and then hardware, software and different platforms are discussed and developed. Two tested cases are presented. One is for rehabilitation training of a patient with elbow ligament...
This paper presents a piezoelectric stack pump for precise actuator. The piezoelectric pump is characterized by long travel range, precise flow, large driving force, etc. Simulations and experiments showed that the piezoelectric pump has high efficiency and good performance. With a voltage of 100V, the flow rate is linear when the rectangle pulses count, so the displacement can be controlled. And...
This paper reports on a robust optimal design of MEMS gyroscope. Proposed robust design method uses perturbation method, which doesn't need to calculate derivative compared with method based on sensitivity analysis, considering the worst-case tolerance instead of statistical information about uncertainties. Monte Carlo analyses of robust and deterministic optimization are also studied, and results...
This study investigates the fabrication of a micro humidity sensor integrated with circuitry using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The advantages of the humidity sensor include small volume, high sensitivity, and integrated with circuitry on a chip. The sensor, which is a capacitive type, comprises the improved interdigital...
The mass resolution of the sensor based on a film bulk acoustic resonator (FBAR) needs to be improved when it is used to detect small molecules with low concentration. A method to improve the mass resolution of FBAR by active control technology is proposed. The active control function is realized by introducing an active control piezoelectric layer between the sensing piezoelectric layer and the substrate...
Pure ZnO, pure MgO and 5 wt%MgO/ZnO nanocomposites were produced by flame spray pyrolysis (FSP) in a single step using zinc naphthenate and magnesium acetate tetrahydrate as Zn and Mg precursors. The particle properties were analyzed by XRD, BET and TEM analyses. The sensing films were prepared by mixing the nanoparticles into an organic paste composed of ethyl cellulose and terpineol as a vehicle...
A novel Micro-Fluidic Self-destruct Device (MFSD) for microchips has been exploited; the purpose of the MFSD is to destroy the structure and date of the microchip, especially in abnormal environment. According to the characteristic of abnormal environment, this article puts forward self-absorb self-destruct system based on micro-fluidic for the memory chip, and this system can sense the stranger's...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
To enlarge the dynamic measurement range and improve the performance by reducing the influence of the main noise including thermo-mechanical noise, 1/f mechanical and tunneling noise, Johnson noise, and shot noise, tunneling sensors usually are operated in a closed-loop mode. Under the assumption that these noises are approximately Gaussian and the tunneling current/gap exponential relationship can...
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