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Carbon nanotubes were synthesized directly on the alloy contained Fe and Ni surface coated by iron nano-powder catalyst from the V-type pyrolysis flame. Scanning electron microscope and transmission electron microscope were used to characterize the morphology and structure of carbon nanotubes. The results show that luxuriant carbon nanotubes with high yield and purity were fabricated on the alloy...
We present here a miniaturized lab-on-a-chip (LOC) system that integrates cell capture and preconcentration, polymerase chain reaction (PCR), and capillary electrophoresis (CE) for pathogen detection. For efficient cell capture on a chip, we used an optimized bifurcated microfluidic channel design and a pumping flutter scheme to isolate target cells, E. coli K12 and E. coli 0157, in a fluidized bed...
In MEMS/NEMS applications, it is always desirable to have materials with good mechanical properties such as high strength and corrosion resistance. Metallic glass thin films are known to exhibit such properties. Here we report on properties of magnetic metallic glass (Fe0.72B0.24Nb0.04)(100-x)Ndx (4≤x≤8) thin films formed by electron cyclotron resonance (ECR) ion-beam sputtering. The atomic composition...
This paper presents the fabrication process and the properties of the CoNiMnP-based permanent magnetic film fabricated with electrodeposition technique. The CoNiMnP magnetic film was fabricated on silicon substrate using MEMS compatible micromachining process. The film consists of magnet array with 5mm×5mm square cells with the thickness of 12μm and 20μm. And some specific methods were used in the...
Based on a 4 μm thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators,...
In this paper, microgyroscopes using fully decoupled structure (FDS) and partially decoupled structure (PDS) were designed. They both consist of dual proof mass, sense frame and drive frame structure. Sense frame is directly anchored on the substrate in FDS. The cross talk between drive mode and sense mode was investigated. The ANSYS software has been used to simulate two types of decoupled Z-axis...
Bamboo-like carbon nanotubes were synthesized successfully from V-type pyrolysis flame. Carbon monoxide was employed as carbon source and pentacarbonyl iron was served as catalyst. The carbon nanotubes attached on the sampling probe were characterized by scanning electron microscope and transmission electron microscope. The results show that the size of catalyst particle is approximate linear relationship...
The purpose of this research was to find a cost effective and repeatable method for releasing high-quality micro-parts from a silicon substrate by bulk micromachining technology. Crystallographic shape removal technology on the finally released silicon oxide parts was put into scrutiny. Several methods were approached as possible solutions. These methods include ethylenediamine - pyrocatechol - water...
Due to the thermal mismatch between GaN and Si, GaN grown on Si at elevated temperatures (~1100 °C) usually exhibits large internal residual stress. Therefore, the characterization of residual stress in GaN on Si substrate is of particular importance. In this work, a type of reliable bent-beam strain sensor was used to estimate residual stress in suspended GaN microstructures. The device was modeled...
Presently, due to the important applications in various clinical diagnoses and drug analyses, cell-secreted analyte detection, especially based on a microfluidic operation principle, has attracted tremendous interests. In this work, optimum control mode for this microfluidics biosensing process is identified based on a numerically obtained phase chart. Normally there are four control modes, namely...
A fabrication process of microlens array using multiple plane waves interference is described. Maskless exposure system is superposed on a photoresist coated substrate layer. Multiple plane waves interference is provided by the refractions of gratings. The period of microlens array range from 1um to 10um and the diameter of single microlen can be produced less than the period. Furthermore large area...
We report a high-aspect ratio electroplating technique that is assisted by focused laser irradiation to construct further narrow and tall three-dimensional (3-D) microstructures. Focused laser irradiation strengthens localized electrical field near the focal spot, thus enabling faster nucleation of ions and construction of higher aspect ratio pillars than typical chemical electroplating. We compared...
This paper reports the successful fabrication and testing of all-diamond micro-electrode-arrays (MEAs) for use in neural recording and chemical detection applications using standard electrochemical methods. The MEAs have been tested through in vivo neural recordings. Also, electrochemical probes are reported using diamond as working and reference electrodes, achieving a potential window of about 4...
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