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In the design process, modelling is a fundamental stage which allows the designer to obtain a general overview of the device performance. Very often, this phase is very time-consuming, especially if a well optimized device which fulfils very specific requirements is to be fabricated. Hence, a fast and reliable technique of simulation is needed and accurate tools have to be used to achieve this goal...
In this paper, a methodology is proposed for expediting the coupled electro-mechanical two-dimensional finite element modeling of electrostatically-actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of the device during mechanical deformation. With the reference domain defined to be the device geometry in the absence...
In this contribution we present system-level modeling and simulation results for an electrostatic energy harvester with electrically adjustable operation frequency. The device is able to convert mechanical energy present in ambient vibrations into electrical energy. The energy is stored by charging a capacitor and available at constant voltage. The lumped model of the harvester includes the mass-dynamics...
This study presents a newly developed dynamic model established by MATLAB Simulink that can handle post pull-in behavior of MEMS electrostatic torsional mirror. In addition to the conventional MATLAB Simulink model of the quadratic oscillation system, a mathematical model of displacement limiter has been inserted to represent the pull-in effect in dynamic analysis. Due to the modification, the model...
The reliability of the electrostatically actuated MEMS contact switches is known to be significantly undermined by the unstable dynamic behaviour of devices. High impact forces, bouncing at the contact and oscillations upon release result in substantial mechanical damage to the contacts and the switch compromising the functionality of the switch and reducing its lifetime. Certain effects become more...
We present a computationally efficient multi-energy domain coupled system-level model of an electrostatically actuated RF-MEMS switch exposed to squeeze film damping. The physically-based model is systematically derived and calibrated on the basis of a hierarchical modeling approach. The model shows excellent agreement with both static and dynamic measurements performed with a white light interferometer...
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