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The reliability of the electrostatically actuated MEMS contact switches is known to be significantly undermined by the unstable dynamic behaviour of devices. High impact forces, bouncing at the contact and oscillations upon release result in substantial mechanical damage to the contacts and the switch compromising the functionality of the switch and reducing its lifetime. Certain effects become more...
We present a computationally efficient multi-energy domain coupled system-level model of an electrostatically actuated RF-MEMS switch exposed to squeeze film damping. The physically-based model is systematically derived and calibrated on the basis of a hierarchical modeling approach. The model shows excellent agreement with both static and dynamic measurements performed with a white light interferometer...
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