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A valve-less micropump with isosceles triangle cross-section nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O3) patch had been successfully fabricated by MEMS (mciro-electromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have...
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