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Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining...
This study produces low-temperature poly-silicon (LTPS) film by aluminum induced crystallization (AIC) method on Corning Eagle2000 glass substrate. Through the control of different sputtering power in depositing aluminum film, five kinds of specimens with sputtering power of 100, 200, 400, 800 and 1600 Watts, respectively, are made. Crystal quality, surface morphology, roughness and film residual...
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