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Gecko has elaborate adhesive structure which allows it to move along vertical walls and ceilings quickly. There is strong evidence that the adhesion ability is due to van der Waals forces. Synthetic dry adhesive hairs inspired by gecko foot-hairs have been microfabricated by several groups. To obtain re-attachable dry adhesive hairs with mass production potential, ICP technique is employed to fabricate...
A new method for realization of 3D multilayer micro structures is presented in this paper. It consists of two major processes: silicon etching process and UV-LIGA process. In this way, some shape limitations of single technology can be overcome for new functions. By combining these processes, multilayer structures and complex graphics can be fabricated. To make good combination, the adhesive characteristics...
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