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Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction...
Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed,...
In this paper, a novel silicon micromachining using CO2 laser has been demonstrated for the first time. The wavelength of CO2 laser is 10.64 mum and not absorbed by silicon material. So, it cannot do any micromachining for pure silicon. However, as we put a silicon on the top of a glass material, CO2 laser can etch the silicon, even etch through the wafer to be a hole structure. For example, a silicon...
Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic...
We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA),...
Silicon-based MEMS techniques are very popular for the manufacture of micro parts. Only a limited number of materials can be processed by these techniques. As the rapid development of Selective Laser Sintering(SLS) in laser rapid prototyping field almost any material can be used. Laser Micro Sintering(LMS) was recently introduced in the fabrication of 3D MEMS parts. The main difference between SLS...
Silicon nanostructures were fabricated by a natural lithography technique, with sizes far beyond the limit of conventional, by a self-organizing gold colloidal particle monolayer as an etch mask. The silicon nanostructures with high density and uniformity in height and shape were obtained using reactive ion etching (RIE). The uniform spatial distribution of the Si nanostructures can also be obtained...
This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot...
Most of the biosensors are based on the enzymatic electrochemical analysis and are disposable due to the use of the enzymes that are living creatures. Thus, these are limited to the in-vivo and handheld continuous monitoring sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable electrochemical sensors without using...
Gecko has elaborate adhesive structure which allows it to move along vertical walls and ceilings quickly. There is strong evidence that the adhesion ability is due to van der Waals forces. Synthetic dry adhesive hairs inspired by gecko foot-hairs have been microfabricated by several groups. To obtain re-attachable dry adhesive hairs with mass production potential, ICP technique is employed to fabricate...
A novel microsensor combining piezoresistive and thermal resistive components is designed and fabricated. A 50mum thick silicon diaphragm (500mumtimes500mum) is used, thicker than that of the conventional piezoresistive pressure sensor, which extends the high stress distribution in the bulk silicon, and increases the operating range as well as the burst pressure. Novel meander shape piezoresistors...
Macroporous silicon technology is an important method to fabricate microchannels on silicon. The formation of insulator layer on the sidewall of the channels is necessary for electrical isolation or passivation of the surface. Oxidation is one of the preferred options. In this paper we investigate the effect of various oxidation processes on the smoothness of the sidewalls of the high aspect ratio...
Optimization of drug delivery through human skin is important in modern therapy, and with the invention of painless microneedles makes it become true. This paper presents a novel fabrication process for a tapered hollow metallic needles array using nickel plating on the silicon microneedles molds. The silicon microneedles molds, with a shank height of 150-200 mum and 300 mum center-to-center spacing...
Two-phase convective flow in micro channels has numerous promising applications such as electronic cooling. This study investigates evaporation phenomena and capillary-driven heat in a rectangular micro channels structure with hydraulic diameters of 100 ~ 250nm and length of 75mm. The micro channels made of (110)-orientated silicon is fabricated by bulk micromachining. The temperature distributions...
In this paper, a self-aligned SiGe/Si HBT was fabricated based on dry/wet etching, in which Si and SiGe materials were etched by KOH (potassium hydroxide) solution and SF6 (sulfur hexafluoride). In the terms of mesa SiGe HBT production, it is a key technology to control the etch of ultra-thin Si and SiGe film. When N+/N silicon in emitter region is etched, the length of etch time is critical. If etch...
In this paper the thermal conductivities of monocrystal carbon, silicon, and germanium nanometer thin film are simulated respectively using non-equilibrium molecular dynamics (NEMD) method and corresponding Tersoff potential energy function. The simulation results indicate that the thermal conductivities of those nanometer thin films are obviously lower than the corresponding thermal conductivities...
The design and fabrication for a novel silicon-based micro direct methanol fuel cell (mu-DMFC) of 0.64cm2 active area on <100> silicon wafer are described in this paper. The novelty of the DMFC structure is that the anodic micro channels arranged in the asymmetric mesh have been fabricated, and the first objective of the experimental trials is to verify the feasibility of the novel structure...
The squeeze film damping effect generating from the sealed air gap between a vibrating circular thin plate and a fixed substrate is analyzed in this paper. Both the Bessel series technique and the Rayleigh-Ritz energy method are utilized to investigate the gas damping effect on the micro airflow in a sealed chamber. The air pressure distribution of the squeeze film air damping is determined by solving...
This paper reports a bulk Si micromachined distributed digital microwave phase shifter with butterfly-like loading microbridges. Having a multilayer structure, the bridges use heavily boron-doped single crystal silicon (SCS) as the skeleton layer, so that the excellent mechanical property of SCS can be utilized to ensure the performance and reliability of the device. The fabrication is shown to be...
For better understanding of the essential removal mechanisms of brittle material and stress distribution at high speed and ultrasonic elliptical vibration assisted cutting conditions at the atomic level, the single crystal silicon, expected as a next generation semiconductor material for wide band cap, high-voltage and low-loss power devices, MEMS components and so on, is analyzed by molecular dynamics...
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