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A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is...
Piezoelectric material plays an important role in the extensive applications of microelectromechanical systems (MEMS). However, its thick-film fabrication process is still not well-established along with the MEMS development. Here we develop a thick-film microfabrication process specifically for the lead-zirconate-titanate (PZT) piezoelectric material. The growth of thick PZT film is facilitated by...
Micro/nano structures on the surface of the superhydrophobic lotus leaves have been observed with scanning electron microscope (SEM) images, and the hydrophobicity enhanced by rough structures on hydrophobic surface has attracted lots of interests. This paper studied on the effects of micro-structures. From replication of lotus leaves surface by using poly-dimethylsiloxane (PDMS), micro-structures...
Based on the standard CMOS process and the post- CMOS micromachining processes, an integrated flow sensor with comprising micro structures and mixed signal processor in 2 mm square chip die size was developed in this study. The sensor microstructures consist of a polysilicon micro heater and the thermopiles array. The central micro heater encircled by the temperature sensors generates the thermal...
This study presents the design, simulation, fabrication and preliminary results of a cell trap device for detecting the early stage of apoptosis, PS (phosph-atidylserine) exposure, under single-cell resolution. The structure of biochip is consisted of ITO top electrode, PDMS flow chamber, bottom electrode array and SU-8 3D microstructure array. In order to achieve single-cell resolution, we utilize...
Testing of microstructure dynamics is necessary to develop reliable and marketable microelectromechanical systems (MEMS) products. A measurement system for three-dimensional motions and dynamics characterization of MEMS is presented in this paper. The system integrates phase shifting interferometry, microvision, stroboscopic illumination, and base excitation, thus is able to measure the surface shapes...
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