The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, the CFD approach is used to simulate the thermal behavior in an electromagnetically driven microgyroscope. The driving wires, in which the alternating current flows, are treated as the heat sources. For a glass-silicon-glass device structure, it is found that the differences of the temperature, pressure and velocity along the driving direction surrounding the proof masses increase as...
In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a...
A novel comb capacitor, the fixed and movable fingers of which have different positions but the same height, is proposed. The comb capacitor can be used to measure out-of-plane movement through differential method and has low air damping. Using this kind of comb capacitor, a bulk micromachined y-axis gyroscope is designed, whose structure is doubly decoupled. The gyroscope is fabricated by silicon/glass...
A MAG-muIMU which is based on MEMS gyroscopes, accelerometers, and magnetometers is developed for real-time estimation of human hand motions. Appropriate filtering, transformation and sensor fusion techniques are combined in the ubiquitous digital writing instrument to record handwriting on any surface. In this paper, we discuss the design of an extended Kalman filter based on MAG-muIMU (micro inertial...
This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense...
Mechanical coupling between the two working modes usually makes the micromachined Coriolis vibratory gyroscope's operation unstable. In this paper, one Z-axis gyroscope which is sensitive to angular rotation about one axis normal to the plane of the silicon chip was mechanically decoupled through sixteen independent suspension beams. The sixteen beams were classified into four groups, i.e. inner drive...
The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but...
A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated...
The Micro Electrics Mechanics System (MEMS) gyroscope has the virtue of lower price, smaller size, lighter weight than of the traditional rate sensors. It can be widely used in the low-price inertial navigation system. But limited by its machining precision, the MEMS gyroscope usually has the large drift. Using the digital signal procession (DSP) of drift signal, the performance of the MEMS gyroscope...
This paper presents the design, simulation, fabrication and preliminary test results of a monolithic triaxial micromachined vibratory gyroscope. The device is a monolithic integration of two uniaxial in-plane (x- and y-axis) gyroscopes and one uniaxial out-of-plane (z-axis) gyroscope and the three individual gyroscopes are all actuated by electrostatic force and detected by capacitors. In order to...
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.