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Mach Zehnder type optical modulators with modified ridge structure on a coplanar waveguide traveling wave electrode are investigated by the use of finite element method and BPM CAD waveguide software. The two ends of conventional ridge structure added taped ridge structures is considered, the transmission loss is obviously reduced. It is shown that the device increased modified ridge structure can...
Thrust ripple such as side force, slot force and normal force is key factor which affects the properties of permanent magnet linear synchronous motors (PMLSM). Furthermore, model uncertainties and disturbances greatly affect the PMLSM's motion properties too. Side force was greatly decreased by optimizing the length of the PMLSM mover, and slot force caused by slot effect was greatly reduced by using...
This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system...
A differential capacitive silicon z-axis micro-accelerometer with special tethers, based on anisotropy etching, anodic bonding and DRIE (deep reactive ion etching) technology is proposed and a novel inertia structure is designed. The device with a three-layer structure can provide a variable sensitivity as changing the thickness of the beam fabricated by one set of masks. The simulation of the static...
Piezoelectric resonators have widely been utilized not only for time keeping devices but also for temperature measurement sensors. In order to obtain a temperature sensor having low power consumption, low cost, fast response, high sensitivity and high precision, resonance frequency of quartz tuning fork crystal for use in temperature sensor was analyzed by the finite element method (FEM). FEM was...
This paper presents the design, simulation, fabrication and preliminary test results of a monolithic triaxial micromachined vibratory gyroscope. The device is a monolithic integration of two uniaxial in-plane (x- and y-axis) gyroscopes and one uniaxial out-of-plane (z-axis) gyroscope and the three individual gyroscopes are all actuated by electrostatic force and detected by capacitors. In order to...
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal...
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