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After successful fabrication and characterization of the first ICP based tunneling accelerometer, we modified the fabrication process to eliminate the knife-blades on the beam, which is caused by the double mask ICP process. These changes have resulted in about 20% yields enhancement at the open-loop characterization phase. The new process also enhances the height of the proof mass without increasing...
A novel comb capacitor, the fixed and movable fingers of which have different positions but the same height, is proposed. The comb capacitor can be used to measure out-of-plane movement through differential method and has low air damping. Using this kind of comb capacitor, a bulk micromachined y-axis gyroscope is designed, whose structure is doubly decoupled. The gyroscope is fabricated by silicon/glass...
This paper presents a novel application of MEMS accelerometer in target classification by means of advanced information processing. The detection system based on MEMS accelerometer is small in size, light in weight, has low power consumption and low cost, and can work under severe circumstances for many different applications. In order to extract features of seismic signals stimulated by different...
A MAG-muIMU which is based on MEMS gyroscopes, accelerometers, and magnetometers is developed for real-time estimation of human hand motions. Appropriate filtering, transformation and sensor fusion techniques are combined in the ubiquitous digital writing instrument to record handwriting on any surface. In this paper, we discuss the design of an extended Kalman filter based on MAG-muIMU (micro inertial...
A differential capacitive silicon z-axis micro-accelerometer with special tethers, based on anisotropy etching, anodic bonding and DRIE (deep reactive ion etching) technology is proposed and a novel inertia structure is designed. The device with a three-layer structure can provide a variable sensitivity as changing the thickness of the beam fabricated by one set of masks. The simulation of the static...
Several piezoresistive micro accelerometers have been commercially used, nevertheless, their sensitivity is not high enough for some special applications. A novel 'piezoresistive' micro accelerometer based on resonant tunneling diode (RTD) is proposed in this work, it is reported to be of higher sensitivity. To preliminarily study such a structure as well as the RTD, a testing system is designed and...
Previous researches indicate that a first-order sigma-delta micromachined accelerometer can hardly achieve a high dynamic rang at an acceptable oversampling rate. We have designed a second-order sigma-delta modulator, which includes two integrators and three gains, for micromachined accelerometers. By simulation in Matlab, we have found that the system gain of the second-order sigma-delta micromachined...
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