2017 XIIIth International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) > 154 - 156
Source
Abstract
Identifiers
book e-ISBN : | 978-1-5386-4001-2 |
DOI | 10.1109/MEMSTECH.2017.7937555 |
book e-ISBN : | 978-1-5386-4001-2 |
DOI | 10.1109/MEMSTECH.2017.7937555 |