Improving the process tool productivity, in other words reducing the cost in semiconductor manufacturing is a constant way of life and reducing cost of consumables (CoC) is just one of many ways in which the industry can become more competitive and hence, more profitable. The seal type or material is an integral part of this cost equation. In this paper, a comprehensive study has been carried out to benchmark seal materials from the leading O-ring or elastomer suppliers in order to alleviate the risk of incorrect seal choice, potentially leading to scrapped product or wasted test resource.